Resumen
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon.
This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar.
This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
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Informaciones generales
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Estado: PublicadoFecha de publicación: 2023-10Etapa: Norma Internacional publicada [60.60]
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Edición: 3Número de páginas: 44
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Comité Técnico :ISO/TC 202/SC 3ICS :37.020
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Ciclo de vida
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Anteriormente
RetiradaISO 29301:2017
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Ahora
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