Abstract
ISO/TR 19319:2003 provides information for measuring (1) the lateral resolution, (2) the analysis area, and (3) the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
General information
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Status: WithdrawnPublication date: 2003-12Stage: Withdrawal of International Standard [95.99]
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Edition: 1Number of pages: 17
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Technical Committee :ISO/TC 201/SC 2ICS :71.040.40
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Life cycle
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Now
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Revised by
PublishedISO/TR 19319:2013