Abstract

 Preview

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.


General information 

  • Status
     :  Published
    Publication date
     : 2015-12
  • Edition
     : 2
    Number of pages
     : 14
  • Technical Committee
     : ISO/TC 209 Cleanrooms and associated controlled environments
  • ICS
     :
    13.040.35 Cleanrooms and associated controlled environments

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals:

3
Good Health and Well-being
9
Industry, Innovation and Infrastructure

Buy this standard

Format Language
PDF + ePub
PDF + ePub + Redline
Paper
  • CHF92

Life cycle


Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information.

  2. Store
  3. Standards catalogue
  4. TC
  5. ISO/TC 209
  6. ISO 14644-2:2015