International Standard
ISO 18516:2019
Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
Reference number
ISO 18516:2019
Edition 2
2019-01
International Standard
Read sample
ISO 18516:2019
63863
Published (Edition 2, 2019)

ISO 18516:2019

ISO 18516:2019
63863
Language
Format
CHF 194
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Abstract

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are

— the straight edge method;

— the narrow line method;

— the grating method.

This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.

General information

  •  : Published
     : 2019-01
    : Close of review [90.60]
  •  : 2
     : 53
  • ISO/TC 201/SC 2
    71.040.40 
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