Status : Published

Format Language
PDF + ePub
Paper
  • CHF96
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Abstract

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

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General information

  • Status
     : Published
    Publication date
     : 2022-04
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 15
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
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Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

3
Good Health and Well-being
9
Industry, Innovation and Infrastructure

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