This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Status: PublishedPublication date: 2021-04
Edition: 1Number of pages: 15
Technical Committee: ISO/TC 107 Metallic and other inorganic coatings
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