ISO 23216:2021
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ISO 23216:2021
74875

Abstract  Preview

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.


General information 

  •  :  Published
     : 2021-05
  •  : 1
     : 7
  •  : ISO/TC 107 Metallic and other inorganic coatings
  •  :
    25.220.99 Other treatments and coatings

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