This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
Status: PublishedPublication date: 2022-06
Edition: 1Number of pages: 35
Technical Committee: ISO/TC 201/SC 1 Terminology
Buy this standard
|std 1 38||PDF + ePub|
|std 2 38||Paper|