This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
Status: PublishedPublication date: 2022-08
Edition: 1Number of pages: 11
Technical Committee: ISO/TC 112 Vacuum technology
Buy this standard
|std 1 58||PDF + ePub|
|std 2 58||Paper|