ISO 24639:2022
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ISO 24639:2022
79091

Abstract

 Preview

This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.

This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.


General information 

  •  :  Published
     : 2022-07
  •  : 1
     : 15
  •  : ISO/TC 202/SC 3 Analytical electron microscopy
  •  :
    71.040.50 Physicochemical methods of analysis

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