This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).
Status: PublishedPublication date: 2022-07
Edition: 1Number of pages: 8
Technical Committee: ISO/TC 107/SC 9 Physical vapor deposition coatings
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