ISO 24688:2022
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ISO 24688:2022
79454

Abstract

 Preview

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).


General information 

  •  :  Published
     : 2022-07
  •  : 1
     : 8
  •  : ISO/TC 107/SC 9 Physical vapor deposition coatings
  •  :
    25.220.01 Surface treatment and coating in general

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